Feature
・Excellent corrosion resistance at high temperature (400 ℃ or more)
・Hardness is twice that of CVD Yttria Coating
・Can be coated on three-dimensional objects
High temperature exposure test with corrosive gas(ClF3:Chlorine trifluoride)
Method
![](http://www.cvd.co.jp/wp/wp-content/uploads/2020/11/test-zu.png)
Test Condition
Heating temperature:600℃
Gas flow rate:100%ClF3 50sccm
Exposure time:10min
※Comparison example under test conditions
Quartz glass:>35μm etching
Si:red-hot by reaction heat(1400~1800℃)
Results
![](http://www.cvd.co.jp/wp/wp-content/uploads/2020/11/fushoku-gaikan-1024x301.png)
Comparison
Hardness(Nano indenter)
![](http://www.cvd.co.jp/wp/wp-content/uploads/2020/12/nanoindenter.jpg)
Specification summary
Heating temperature :500℃
Maximum size:φ150mm x Height150mm
Material :Quartz, Ceramics, Metal
Please contact us for details.